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電子ビームリソグラフィーにおける位置精度の制御についての研究
https://meisei.repo.nii.ac.jp/records/757
https://meisei.repo.nii.ac.jp/records/757d4ab92d1-4452-432b-93fa-06ae39016948
名前 / ファイル | ライセンス | アクション |
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本文 (541.9 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2015-06-03 | |||||
タイトル | ||||||
タイトル | 電子ビームリソグラフィーにおける位置精度の制御についての研究 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Prediction of positioning error in EB lithography | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者 |
木村, 優樹
× 木村, 優樹× 合田, 一夫× Kimura, Masaki× Goda, Kazuo |
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書誌情報 |
明星大学理工学部研究紀要 en : Research bulletin of Meisei University School of Science and Engineering 号 51, p. 1-5, 発行日 2015-03-24 |
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出版者 | ||||||
出版者 | 明星大学 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13467239 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |